东莞市天测光学设备有限公司苏州分公司

主营：从事美国qvi产品、ogp影像仪、view影像仪、法国keron 关节臂等销售安装培训

精微影像仪MicroLine 300

面议中国江苏苏州昆山市

产品属性

产地:: 美国

保修期:: 1年

载重:: 2kg

品牌:: 其他

操作方式:: 程序控制

型号:: MicroLine 300

分辨率:: 0.0001

测量行程:: 200*200*25

<*n><*n style="font-size:12pt;font-family:宋体;">关键尺寸的自动化光学测量系统<*n style="font-size:12pt;font-family:Arial, sans-serif;">

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<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">MicroLine^TM 300影像测量仪<*n style="font-size:12pt;font-family:宋体;">是*测量晶圆、光罩、<*n style="font-size:12pt;font-family:Arial, sans-serif;">MEMS<*n style="font-size:12pt;font-family:宋体;">和其他微加工设备等关键尺寸的自动化测量系统。该系统配备了高质量光学显微镜和精密移动平台，可对<*n style="font-size:12pt;font-family:Arial, sans-serif;">200mm<*n style="font-size:12pt;font-family:宋体;">的晶圆上<*n style="font-size:12pt;font-family:Arial, sans-serif;">0.5µm<*n style="font-size:12pt;font-family:宋体;">到<*n style="font-size:12pt;font-family:Arial, sans-serif;">400µm<*n style="font-size:12pt;font-family:宋体;">的特征尺寸进行全自动的精密视场测量。<*n style="font-size:12pt;font-family:Arial, sans-serif;">

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<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:Arial, sans-serif;">200 x 200mm<*n style="font-size:12pt;font-family:宋体;">精密<*n style="font-size:12pt;font-family:Arial, sans-serif;">X-Y<*n style="font-size:12pt;font-family:宋体;">平台<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">用于测量透明层、不规则边缘的线、厚膜等的强劲性能<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">完全可编程的序列，包括自动聚焦<*n style="font-size:12pt;font-family:宋体;">和<*n style="font-size:12pt;font-family:宋体;">关键尺寸测量<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">电动的<*n style="font-size:12pt;font-family:Arial, sans-serif;">6<*n style="font-size:12pt;font-family:宋体;">目物镜转换器，软件控制<*n style="font-size:12pt;font-family:Arial, sans-serif;">

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<*n><*n style="font-size:12pt;font-family:宋体;">技术规格：<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">测量行程<*n style="font-size:12pt;font-family:Arial, sans-serif;">: 200 x 200 x 25mm (XYZ)

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">平台运行<*n style="font-size:12pt;font-family:Arial, sans-serif;">: <*n style="font-size:12pt;font-family:宋体;">交叉滚轴手动同轴*和快速释放<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">视场内的测量精度<*n style="font-size:12pt;font-family:Arial, sans-serif;">: 0.010<*n style="font-size:12pt;"><*n>µ<*n style="font-size:12pt;font-family:Arial, sans-serif;">m (<*n style="font-size:12pt;font-family:宋体;">用<*n style="font-size:12pt;font-family:Arial, sans-serif;">100x<*n style="font-size:12pt;font-family:宋体;">物镜<*n style="font-size:12pt;font-family:Arial, sans-serif;">)<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">特征尺寸<*n style="font-size:12pt;font-family:Arial, sans-serif;">: <*n style="font-size:12pt;font-family:宋体;">视场内<*n style="font-size:12pt;font-family:Arial, sans-serif;">0.5<*n style="font-size:12pt;font-family:Arial, sans-serif;">µm - 400µm

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- FOV<*n style="font-size:12pt;font-family:宋体;">测量重复性<*n style="font-size:12pt;font-family:Arial, sans-serif;">: <<*n style="font-size:12pt;font-family:Arial, sans-serif;">0.010<*n style="font-size:12pt;"><*n>µ<*n style="font-size:12pt;font-family:Arial, sans-serif;">m on wafers (<*n style="font-size:12pt;font-family:宋体;">用<*n style="font-size:12pt;font-family:Arial, sans-serif;">100x<*n style="font-size:12pt;font-family:宋体;">物镜<*n style="font-size:12pt;font-family:Arial, sans-serif;">)<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"><<*n style="font-size:12pt;font-family:Arial, sans-serif;">0.005<*n style="font-size:12pt;"><*n>µ<*n style="font-size:12pt;font-family:Arial, sans-serif;">m on photomasks (<*n style="font-size:12pt;font-family:宋体;">用<*n style="font-size:12pt;font-family:Arial, sans-serif;">100x<*n style="font-size:12pt;font-family:宋体;">物镜<*n style="font-size:12pt;font-family:Arial, sans-serif;">)

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">照明<*n style="font-size:12pt;font-family:Arial, sans-serif;">: <*n style="font-size:12pt;font-family:宋体;">石英卤素灯<*n style="font-size:12pt;font-family:Arial, sans-serif;">, <*n style="font-size:12pt;font-family:宋体;">反射光<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"> <*n style="font-size:12pt;font-family:宋体;">自动照明<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">低噪音<*n style="font-size:12pt;font-family:Arial, sans-serif;">CCD VGA<*n style="font-size:12pt;font-family:宋体;">格式摄像头<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- <*n style="font-size:12pt;font-family:宋体;">图像处理<*n style="font-size:12pt;font-family:Arial, sans-serif;">60<*n style="font-size:12pt;font-family:宋体;">帧每秒<*n style="font-size:12pt;font-family:Arial, sans-serif;">

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<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">MicroLine 300<*n style="font-size:12pt;font-family:宋体;">的典型应用包括：<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">晶圆<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">光罩<*n style="font-size:12pt;font-family:Arial, sans-serif;">

<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:Arial, sans-serif;">MEMS

<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">微型组件<*n style="font-size:12pt;font-family:Arial, sans-serif;">

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<*n><*n style="font-size:12pt;font-family:宋体;">测量类型<*n style="font-size:12pt;font-family:Arial, sans-serif;">:

<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:宋体;">关键尺寸<*n style="font-size:12pt;font-family:Arial, sans-serif;">:

<*n><*n style="font-size:12pt;font-family:宋体;">线宽<*n style="font-size:12pt;font-family:Arial, sans-serif;"> Linewidth

<*n><*n style="font-size:12pt;font-family:宋体;">节距<*n style="font-size:12pt;font-family:Arial, sans-serif;"> Pitch

<*n><*n style="font-size:12pt;font-family:宋体;">间隙<*n style="font-size:12pt;font-family:Arial, sans-serif;"> Spacing

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<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> <*n style="font-size:12pt;font-family:Arial, sans-serif;">Overlay

<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n> Multi-layer registration

<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n>Box in box

<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n>Circle

<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n>Edge roughness

<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n>Butting error

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