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<*n>   新的Precis® 200是基于Micro-Metric的Innova晶圆量测系统开和发而来，采用了VMM 公司好的设计和技术。
, 新款Precis 包含了很多可配置选项，使设备更加通用，好用以及可靠。

• <*n>扩展了Z轴范围 – 2.5mm, 5mm or 100mm
• <*n>透射照明 
• <*n>完整电子绘图 – 完全符合 SEMI S2 和 CE 标准
• <*n><*n>符合*工程学的操作员控制台 ，带有隐藏键盘托盘, 可调节高度和角度的控制面板和显示器, SEMI S8 符合
• <*n>全自动显微镜，所有设置计算机控制
• <*n>****分辨率像素摄像头
• <*n>VIEW Metrology Software (VMS™) 可测组件很广泛, 可选CAD导入 以及完整的几何尺寸和公差导入。
• <*n>MMWin – 晶圆片 和Mask计量软件 –晶圆片的重要尺寸和迭置重合测量, 滑块 ABS,光掩模和平板显示器.
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• <*n>                                      标准                        可选
• <*n><*n>  X,Y,Z行程(mm):        200 x 200 x 50              200 x 200 x 100 
• <*n>  ****载重:                 12 kg
• <*n>  XY精度:                    E1=(0.25+2L/1000)um
• <*n>  Z 精度:                     E1=(0.25)um (with use of a 100X lens)
•   分辨率：                    0.01 微米
•   视场测量精度和重复性：0.01 μm (100x)
•   直流伺服马达驱动
   

  <*n>The all-new Precis® 200 incorporates the most advanced design and technology from VIEW-MM. Based on the proven Innova wafer metrology system from Micro-Metric, the new Precis includes a number of configurable opti* that make the system more versatile, serviceable and reliable:

  • <*n>Extended Z-axis range – 2.5mm, 5mm or 100mm
  • <*n>Tran*itted illumination
  • <*n>Integral electronics drawer – fully compliant with SEMI S2 and CE standa*
  • <*n>Ergonomic operator co*ol station with hide-away keyboard tray, adjustable height and angle for co*ol panel and display monitor, SEMI S8 compliant
  • <*n>Fully automated microscope with all settings computer co*olled
  • <*n>Megapixel camera for optimum resolution
  • <*n>VIEW Metrology Software (VMS™)&nb*llows a wide range of components to be measured, with the option of CAD translation and full geometric dimensioning and tolerancing.
  • <*n>MMWin – wafer and mask metrology software – ideal for critical dimension and overlay registration measurement for wafers, slider ABS, photomask and flat panel displays.
  • <*n>                                            Standard                        Optional
  • <*n>  X,Y,Z tr*el (mm):             200 x 200 x 5              200 x 200 x 100 
  • <*n>  Max Recommanded load: 12 kg
  • <*n>  XY Linear Accuracy:           E1=(0.25+2L/1000)um
  • <*n>  Z Linear Accuracy:             E1=(0.25)um (with use of a 100X lens)
  •   Resolution：                     0.01 μm
  •   Field of measurement accuracy and repeatability ：0.01 μm (100x)
  •   Dc servo motor drive
  
  Precis 主要用于以下应用：
  - <*n style="background-color:#99ccff;">亚微米测量：
     ◆   微器件和电子元器件封装、引线框
     ◆   微型球状引脚栅格阵列封装
     ◆   硬盘驱动臂、探针卡、刀片
  - <*n style="background-color:#99ccff;">CD 和套刻测量：
     ◆  线宽、涂覆层
     ◆   MEMS 器件、接触窗、喷墨打印头
     ◆   硬盘驱动头、磁头等

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