<*n><*n style="font-size:12pt;font-family:宋体;">关键尺寸的自动化光学测量系统*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
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<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">MicroLineTM 300影像测量仪*n><*n style="font-size:12pt;font-family:宋体;">是*测量晶圆、光罩、*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">MEMS*n><*n style="font-size:12pt;font-family:宋体;">和其他微加工设备等关键尺寸的自动化测量系统。该系统配备了高质量光学显微镜和精密移动平台,可对*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">200mm*n><*n style="font-size:12pt;font-family:宋体;">的晶圆上*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">0.5µm*n><*n style="font-size:12pt;font-family:宋体;">到*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">400µm*n><*n style="font-size:12pt;font-family:宋体;">的特征尺寸进行全自动的精密视场测量。*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
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<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">200 x 200mm*n><*n style="font-size:12pt;font-family:宋体;">精密*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">X-Y*n><*n style="font-size:12pt;font-family:宋体;">平台*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">基于视觉的自动聚焦获得影像质量*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">自动照明可编程光强*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">用于测量透明层、不规则边缘的线、厚膜等的强劲性能*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">完全可编程的序列,包括自动聚焦*n><*n style="font-size:12pt;font-family:宋体;">和*n><*n style="font-size:12pt;font-family:宋体;">关键尺寸测量*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">电动的*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">6*n><*n style="font-size:12pt;font-family:宋体;">目物镜转换器,软件控制*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">可选的透射照明*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
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<*n><*n style="font-size:12pt;font-family:宋体;">技术规格:*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">测量行程*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">: 200 x 200 x 25mm (XYZ)*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">平台运行*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">: *n><*n style="font-size:12pt;font-family:宋体;">交叉滚轴手动同轴*和快速释放*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">视场内的测量精度*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">: 0.010*n><*n style="font-size:12pt;"><*n>µ*n>*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">m (*n><*n style="font-size:12pt;font-family:宋体;">用*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">100x*n><*n style="font-size:12pt;font-family:宋体;">物镜*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">)*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">特征尺寸*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">: *n><*n style="font-size:12pt;font-family:宋体;">视场内*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">0.5*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">µm - 400µm*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- FOV*n><*n style="font-size:12pt;font-family:宋体;">测量重复性*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">: <*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">0.010*n><*n style="font-size:12pt;"><*n>µ*n>*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">m on wafers (*n><*n style="font-size:12pt;font-family:宋体;">用*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">100x*n><*n style="font-size:12pt;font-family:宋体;">物镜*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">)*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">0.005*n><*n style="font-size:12pt;"><*n>µ*n>*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">m on photomasks (*n><*n style="font-size:12pt;font-family:宋体;">用*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">100x*n><*n style="font-size:12pt;font-family:宋体;">物镜*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">)*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">照明*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">: *n><*n style="font-size:12pt;font-family:宋体;">石英卤素灯*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">, *n><*n style="font-size:12pt;font-family:宋体;">反射光*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"> *n><*n style="font-size:12pt;font-family:宋体;">自动照明*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">低噪音*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">CCD VGA*n><*n style="font-size:12pt;font-family:宋体;">格式摄像头*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">- *n><*n style="font-size:12pt;font-family:宋体;">图像处理*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">60*n><*n style="font-size:12pt;font-family:宋体;">帧每秒*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
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<*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">MicroLine 300*n><*n style="font-size:12pt;font-family:宋体;">的典型应用包括:*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">晶圆*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">光罩*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">MEMS*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">l<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">微型组件*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">*n>*n>
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<*n><*n style="font-size:12pt;font-family:宋体;">测量类型*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">:*n>*n>
<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:宋体;">关键尺寸*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">:*n>*n>
<*n><*n style="font-size:12pt;font-family:宋体;">线宽*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"> Linewidth*n>*n>
<*n><*n style="font-size:12pt;font-family:宋体;">节距*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"> Pitch*n>*n>
<*n><*n style="font-size:12pt;font-family:宋体;">间隙*n><*n style="font-size:12pt;font-family:Arial, sans-serif;"> Spacing*n>*n>
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<*n><*n style="font-size:12pt;font-family:Wingdings;">n<*n style="font-size:7pt;line-height:normal;font-family:""> *n>*n><*n style="font-size:12pt;font-family:Arial, sans-serif;">Overlay*n>*n>
<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n> Multi-layer registration*n>*n>
<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n>Box in box*n>*n>
<*n style="font-size:12pt;font-family:Arial, sans-serif;"><*n>Circle*n>*n>
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