NanoFocus μsurf custom光学轮廓仪

<*n style="font-family:Calibri;font-size:14pt;font-weight:bold;">NanoFocus μsurf custom<*n style="font-family:宋体;font-size:14pt;font-weight:bold;">光学轮廓仪<*n style="font-family:Calibri;font-size:14pt;font-weight:bold;">(<*n style="font-family:宋体;font-size:14pt;font-weight:bold;">三维共聚焦表面测量系统<*n style="font-family:Calibri;font-size:14pt;font-weight:bold;">/3D<*n style="font-family:宋体;font-size:14pt;font-weight:bold;">显微镜<*n style="font-family:Calibri;font-size:14pt;font-weight:bold;">)<*n style="font-family:Calibri;font-size:14pt;font-weight:bold;">

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<*n style="font-family:Calibri;font-size:10.5pt;">品牌：德国<*n>NanoFocus <*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">型号：<*n>μsurf custom<*n style="font-family:Calibri;font-size:10.5pt;">

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<*n style="font-family:Calibri;font-size:10.5pt;">μsurf<*n style="font-family:宋体;font-size:10.5pt;">系列产品采用多孔共聚焦技术，结合<*n style="font-family:Calibri;font-size:10.5pt;">CCD<*n style="font-family:宋体;font-size:10.5pt;">的影像摄取，以有许多孔洞的旋转盘取代侦测器的孔洞，再将物镜垂直移动，以类似断层摄影方式，可在短时间<*n style="font-family:Calibri;font-size:10.5pt;">(<*n style="font-family:宋体;font-size:10.5pt;">约几秒<*n style="font-family:Calibri;font-size:10.5pt;">)<*n style="font-family:宋体;font-size:10.5pt;">内*量测物体的三维数据<*n style="font-family:Calibri;font-size:10.5pt;">。其测量方式是非接触式，不会*样品的表面，不需要在真空环境下测量，也可以用显微镜测量的功能来观测样本，其在严酷的工作环境下，也能正常使用。由于使用了共聚焦的方法，在测量渐变较大的高度时，跟其他方法相比，可以更*量测物体高度，建立<*n>3D<*n>立体影像，优势相当明显。<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">NanoFocus μsurf custom<*n>三维共聚焦表面测量系统，可以根据客户的具体需求进行样品平台和软件的定制，功能齐全，可以自动测量，能*****样品的三维结构和微纳米尺度的复杂几何形状，并拥有超高光学分辨率和*****广泛的三维表面形貌分析处理能力。该机台还配备了整合计算机和测量系统的工作台，可以将一些测试报告等资料放在工作台的抽屉里，便捷可靠。<*n style="font-family:Calibri;font-size:10.5pt;">

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<*n style="font-family:Calibri;font-size:10.5pt;">μsurf<*n style="font-family:宋体;font-size:10.5pt;">系列用来测量表面物理形貌，进行微纳米尺度的三维形貌分析，如<*n style="font-family:Calibri;font-size:10.5pt;">3D<*n style="font-family:宋体;font-size:10.5pt;">表面形貌、<*n style="font-family:Calibri;font-size:10.5pt;">2D<*n style="font-family:宋体;font-size:10.5pt;">的纵深形貌、轮廓（纵深、宽度、曲率、角度）、表面粗糙度等。<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">精密部件：检测对表面磨损，表面粗糙度，表面微结构有要求的零部件，比如发动机汽缸、刀口等<*n>;<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">生命科学：测量<*n>stents<*n style="font-family:宋体;font-size:10.5pt;">支架上镀层厚度等<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">微电子机械系统：微型器件的检测，医药工程中*结构的检测，如*芯片等<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">半导体：检测微型电子系统，封装及辅助产品结构设计<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">太阳能：太阳能电池片栅线的<*n>3D<*n style="font-family:宋体;font-size:10.5pt;">形貌表征、高宽比测量，制绒后<*n style="font-family:Calibri;font-size:10.5pt;">3D<*n style="font-family:宋体;font-size:10.5pt;">形貌表征（单晶金字塔大小、数量、角度，多晶腐蚀坑形貌、密度），粗糙度分析等<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">纸张：纸张、钱币表面三维形貌测量<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Wingdings;font-size:10.5pt;"><*n>ü<*n> <*n style="font-family:Calibri;font-size:10.5pt;">LED<*n style="font-family:宋体;font-size:10.5pt;">：用于蓝宝石衬底的测量，抽检<*n style="font-family:Calibri;font-size:10.5pt;">PSS ICP<*n style="font-family:宋体;font-size:10.5pt;">后的<*n style="font-family:Calibri;font-size:10.5pt;">WAFER<*n style="font-family:宋体;font-size:10.5pt;">的<*n style="font-family:Calibri;font-size:10.5pt;">3D<*n style="font-family:宋体;font-size:10.5pt;">形貌<*n style="font-family:Calibri;font-size:10.5pt;">

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<*n style="font-family:Calibri;font-size:10.5pt;">LED<*n style="font-family:宋体;font-size:10.5pt;">光源：<*n style="font-family:Calibri;font-size:10.5pt;">λ= 505 nm, MTBF: 50,000 h<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">测量时间：<*n>2~10<*n style="font-family:宋体;font-size:10.5pt;">秒<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">测量原理：非接触、共聚焦<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">X/Y<*n style="font-family:宋体;font-size:10.5pt;">方向：平台移动范围：<*n style="font-family:Calibri;font-size:10.5pt;">100mmX100mm/200mmX200mm/300mmX300mm(<*n style="font-family:宋体;font-size:10.5pt;">大小可选<*n style="font-family:Calibri;font-size:10.5pt;">)<*n style="font-family:宋体;font-size:10.5pt;">，马达驱动，<*n style="font-family:Calibri;font-size:10.5pt;">X/Y<*n style="font-family:宋体;font-size:10.5pt;">方向分辨率：<*n style="font-family:Calibri;font-size:10.5pt;">0.3μm<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">Z<*n style="font-family:宋体;font-size:10.5pt;">方向测量范围：<*n style="font-family:Calibri;font-size:10.5pt;">350μm<*n style="font-family:宋体;font-size:10.5pt;">，<*n style="font-family:Calibri;font-size:10.5pt;">Z<*n style="font-family:宋体;font-size:10.5pt;">方向分辨率：<*n style="font-family:Calibri;font-size:10.5pt;">< 1nm<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">物镜：<*n>10X<*n style="font-family:宋体;font-size:10.5pt;">、<*n style="font-family:Calibri;font-size:10.5pt;">20X<*n style="font-family:宋体;font-size:10.5pt;">、<*n style="font-family:Calibri;font-size:10.5pt;">50X<*n style="font-family:宋体;font-size:10.5pt;">、<*n style="font-family:Calibri;font-size:10.5pt;">100X(<*n style="font-family:宋体;font-size:10.5pt;">可选<*n style="font-family:Calibri;font-size:10.5pt;">)<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">离轴摄像头<*n>(10X)<*n style="font-family:宋体;font-size:10.5pt;">，****大视野<*n style="font-family:Calibri;font-size:10.5pt;">8 x 6 mm2(<*n style="font-family:宋体;font-size:10.5pt;">选配<*n style="font-family:Calibri;font-size:10.5pt;">)<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">计算机：*计算机控制系统，功能强大且*的软件，有拼接功能<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">配有****工作台：尺寸<*n>1550800x750 mm (LxWxH)<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">工作电源：<*n>100-240V, 50-60Hz<*n style="font-family:宋体;font-size:10.5pt;">，<*n style="font-family:Calibri;font-size:10.5pt;">input: 550 VA<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">材质：钢铁、橡胶、大理石<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">重量：约<*n>150KG+80KG<*n style="font-family:Calibri;font-size:10.5pt;">

<*n style="font-family:Calibri;font-size:10.5pt;">洁净室等级<*n>: Capability class 6&nb*ccording to DIN EN ISO 14644)<*n style="font-family:Calibri;font-size:10.5pt;">

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<*n style="font-family:Calibri;font-size:10.5pt;font-weight:bold;">设备咨询联系人<*n>: <*n style="font-family:Calibri;font-size:10.5pt;font-weight:bold;">

<*n style="font-family:Calibri;font-size:10.5pt;">Ronnie Chen  +86-13651969369   +86-21-61533166  <*n><*n class="15" style="color:#0000FF;font-family:"Times New Roman";text-decoration:underline;">ronniechen@nanofocus*.cn<*n style="font-family:Calibri;font-size:10.5pt;">

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